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Characteristics of ZnO Layers Grown on GaN Template Under Argon Pressure by Pulsed Laser Deposition
ZnO Pulsed Laser Deposition Buffer layer Annealing
2009/6/1
We employed epi-GaN substrates for ZnO film growth, and studied the deposition and post-annealing effects. ZnO films were grown by pulsed laser deposition (PLD) method. The as-grown films were anneale...