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Optical Transmission Measurements on Glow-Discharge Amorphous Silicon Nitride Films
A. Optical transmission B. Refractive index C. Swanepoel method D. Hydrogenated amorphous silicon nitride
2010/4/15
Hydrogenated amorphous silicon nitride films have been prepared by the glow-discharge decomposition of ammonia/silane gas mixture. From optical transmission measurements in the wavelength range from 4...