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Fabrication of SOI Optical Waveguide Devices by Anisotropic Chemical Etching
rib waveguide multi-mode interference silicon-on-insulator anisotropic chemical etching
2010/7/16
In order to obtain smooth waveguide interface, thermo-optic (TO) variable optical attenuator (VOA) and 2×2 optical switch based on 3-dB multi-mode interferometer were fabricated using anisotropic chem...