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Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication
Silicon Laser Annealing Electronic Device Fabrication
2009/6/9
Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication.
High Pulse-Energy Green Laser for Laser Annealing System by LD-pumped Nd:YAG Laser
Intra-cavity Annealing SHG LD-pumped
2009/6/1
Recently, we have demonstrated high average-power SHG generation by LD-pumped kHz-class pulsed Nd:YAG laser. Using this technique, we have developed a green laser for the YAG Laser Annealing System. W...
Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate
Laser annealing Alumina thin film Photoluminescence spectrum
2011/12/7
We analyze the effect of the laser annealing on the crystallization of Er3+ doped amorphous Al2O3 thin films deposited on the silica-on-silicon substrate. These thin films were prepared by the microwa...